The Cee® 200FX spin coater combines extremely accurate spin speed repeatability/resolution with high horsepower drive for aggressive acceleration capabilities. These features ensure the elimination of process variables for a large array of process chemicals and applications. The Cee® 200FX has state-of-the-art programmability and has been designed specifically for 300-mm wafers and large LCD squares up to 14" x 14".
• Alphanumeric-capable graphical user interface (GUI)
• User-friendly touch screen interface and display
• 700 spin process programs
• 20 steps per spin program (upgradeable with software option)
• 0.1-second resolution for step times (time: 0 to 999.9 sec/step)
• Spin speed: 0 to 3,000 rpm (optional 6,000 rpm)
• Spin speed acceleration:
• 0 to 30,000 rpm/sec unloaded
• 0 to 20,000 rpm/sec 300-mm substrate
• 0 to 3,000 rpm/sec 300 mm x 6 mm round captive chuck
• 0 to 400 rpm/sec 14" x 14" x 1.1 mm recessed chuck
• Programmable logic controller (PLC) system
• PC compatible: Ethernet port for communications for uploading/downloading process
parameters standard
• Simultaneous dual automated dispense capability
• Security: Password protection option at no charge
• Spin speed repeatability: < 0.2 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate sizes: Maximum 450 mm round / 14" x 14" square
• Indirect drive system protects the spin motor from accidental contact with
process chemicals and solvents
• Vacuum and lid interlock standard
• Industry-leading reliability and up-time
• 1-year full warranty for parts and labor
• Free technical phone support for the life of the product
• Application process assistance for life of the product
• All stainless steel construction
• ETFE-coated spin bowl optional for material compatibility
• Optional polyethylene/Teflon® splash ring
• Drain and exhaust ports located in bottom of bowl
• Optional nitrogen purge for an inert spin environment
• Machine weight: 55 lb (25 kg)
• Shipping weight: 160 lb (72.6 kg)
• Cabinet dimensions: 36 L x 27.75 W x 14.25 H (91.5 cm x 70.5 cm x 36.2 cm)
• Power requirements: 200 to 240 VAC / single phase / 1350 watts / 7.0 amp• Drain port: 1 OD• Exhaust port: 1.5 OD• Vacuum: 25/Hg• Exhaust: 50 cfm• Nitrogen or CDA (for automatic dispense): 70 psi
Brewer Science welcomes the opportunity to provide quality solutions for your specific application. Please contact us by email or call +573.364.0300 (US). Brewer Science welcomes the opportunity to provide quality solutions for your specific application.
